Nikon_Microscope_amp_Magnifier

MEMS

???Printer heads

???Micro sensors

???Optical switches

???GMR heads for HDD

Casts and parts

???OA equipment parts

???Cell phones, PDAs, DSC, PC parts

???Automobiles, aeronautics

PCB

Extend Versatilityyour

vision

Versatility

Extend your vision

Optical performance

Improved performance

A modular microscopy system for breadth and depth

LV-S32 3x2 Stage Stroke: 75 x 50 mm

LV-S6 6x6 Stage Stroke: 150 x 150 mm

LV-SUB Stage

(exclusive for LV150/LV150A)

L-S6WH Wafer Holder 6 (for LV-S6 6x6 Stage)

LV-S32PL ESD Plate (for LV-S32 3x2 Stage)

Versatility

The modular design of the Eclipse LV series allows an unprecedented level of versatility. The Eclipse LV series offers flexibility that enables it to cover a wide variety of products and applications, extending from development and quality control to inspection in the manufacturing process. Users will recognize the superb performance of the Eclipse LV series when inspecting semiconductors, FPD, packages, electronics substrates, materials (material science), medical devices, cast/metallic/ceramic parts, precision molds, MEMS, telecommuni- cations devices, and a wide variety of other samples.

Accepts taller samples

The maximum sample height can be increased to 82mm from 47mm by inserting the LV-CR Column Riser 35 between the main body and arm of the microscope. This feature is useful for viewing the surfaces of precision molds, optical materials and other thick samples.

Extensive range of industrial stages and accessories

Users can select suitable models based on sample and stage stroke. All stages are highly durable with triple-plate design.

Compact industrial stage: LV-S32 3x2 Stage

The newly designed LV-S32 3x2 is a compact stage for industrial microscopes. Its triple-plate design ensures

durability, stability and ease of use, even when heavy samples such as metallic materials are observed. The standard glass plate makes this stage suitable for episcopic and diascopic illumination.

Dia base unit for diascopic illumination

In the Eclipse LV series, the LV-DIA Dia Base is available for diascopic illumination OEM use. Users can now take full advantage of the modular design. A UN2 transformer is used for the power supply.

An example of LV-DIA Dia Base built into a taped sample inspection system

Combination of LV-150 with LV-SUB Substage 2 and Suruga Seiki B23-60CR stage

LV150 standard combination

Versatility

LV-S64 6x4 Stage

Stroke: 150 x 100 mm

LV-SUB Substage 2 (exclusive for LV150/LV150A)

L-S6PL ESD Plate

(for LV-S6 6x6 Stage)

LV-S32SGH Slideglass Holder

(for LV-S32 3x2 Stage)

Appropriate holder and substage are selected based on sample and stage combination.

LV-DIA Bia Base

Extend your vision

A wide variety of observation methods is available with the Eclipse LV series. Observations with first-order compensator, UV polarizing, and epi-fluorescence observations with UV excitation, in addition to brightfield, darkfield, DIC, simple polarizing, epi-fluorescence (excitation using visible light) and double-beam interferometry are all possible. Two new light sources also have been developed: high-intensity, low power- consumption 12V-50W halogen light source and adjustable high-intensity mercury-fiber light source.

Optical Performance

Transmission wavelength coverage extended to UV

CFI LU Plan Fluor series

Universal epi-illuminator: LV-UEPI

The LV-UEPI universal epi-illuminator enables brightfield, darkfield, simple polarizing and DIC observations. Field and aperture diaphragms are automatically opened when the observation is switched from brightfield to darkfield, and return to their original position when switched back to brightfield.

High-intensity 12V-50W halogen light source:

LV-LH50PC Precentered Lamphouse

Although the LV-LH50PC Precentered Lamphouse is 12V-50W, the brightness is equivalent to or higher than that of 12-100W types. The low power- consumption halogen light source contributes to the compact design of the microscope while also being friendly to the environment. Focus drift due to heat from the illuminator is substantially reduced.

The new CFI LU Plan Fluor series covers transmission wavelength ranges up to UV. These objective lenses are suitable for various research, analysis and examination needs, while maintaining Nikon???s commitment to high NA and long working distance. Only one kind of objective lens is needed for brightfield, darkfield, simple polarizing, observation with first- order compensator, DIC and UV epi-fluorescence observations. These objective lenses, which offer high resolution and easy-to- use performance, can be combined not only with microscopes but also with other equipment for even greater versatility.

Objective lenses with correction ring

CFI L Plan EPI CR series

The CFI60 series now includes the CFI L Plan EPI CR series to

CFI60 LU Plan Fluor EPI series

CFI60 LU Plan Fluor BD series

vision

???Brightfield

???Darkfield

???Simple polarizing

???DIC

cope with the thinner coverglass used in liquid crystal displays, and highly integrated, and dense devices. Coverglass correction can be continuously made from 0 mm up to 1.2 mm (0-0.7 mm and 0.6-1.3 mm for 100x) with the correction ring. The 100x objective lens offers 0.85 high NA, while enabling high-contrast imaging of cells and patterns without being affected by the coverglass.

CFI60 L Plan EPI CR series of objective lenses with correction ring

Environmentally friendly

Universal epi-illuminator 2: LV-UEPI2

The LV-UEPI2 universal episcopic illuminator is equipped with advanced optics suited to a wide variety of observation methods???brightfield, darkfield, DIC and epi- fluorescence???and automatically sets optimal

Auto optimal illumination selection

The eco glass used in the CFI LU Plan Fluor and L Plan EPI CR series does not contain harmful substances such as lead and arsenic.

your

illumination in accordance with the field and aperture diaphragm, shutter, and filters, including diffuser and ND. This design enables the operator to concentrate on the observation.

CFI60 Series Objectives

Performance

Extend

??? Brightfield

??? Darkfield

??? Simple polarizing

??? Observation with first-order compensator

??? UV polarizing epi-fluorescence

??? DIC

??? Epi-fluorescence (UV excitation possible)

Optical

Improved performance

Observation Methods

Usability has been vastly improved as has durability and rigidity.

Brightfield

The antiflare design applied to the objective lenses and light source ensures bright, high-contrast images.

Darkfield

Simple polarizing

In addition to simple polarizing, a lambda plate can be inserted into the optical path to achieve observations with a first- order compensator. This is useful for liquid crystal inspections (when used in combination with the LV- UEPI 2).

LV-TT2 Tilting Trinocular Eyepiece

Tube

The newly developed LV-TT2 tilting trinocular eyepiece tube (erect image) offers comfort to all users, regardless of their stature or viewing position. The optical path changeover of 100:0/20:80 allows the simultaneous use of a

Nikon???s unique ???Fly-eye Lens??? used in the darkfield illuminator yields a threefold increase in brightness over previous models. This allows high- sensitivity detection of defects and height gaps in samples.

monitor.

Highly durable motorized nosepiece

LV-NU5A Nosepiece

The LV-NU5A motorized universal quintuple nosepiece is 10 times more durable than its predecessor and can be used with the LV150A. In combination with the LV-NCNT motorized nosepiece controller, it can also be used in other devices.

Manual nosepiece

A variety of manual nosepieces are available to suit all needs.

All parts of the microscope that might be touched, including the body, tube and stage, have been insulated. This improves anticontamination and prevents samples from being harmed by static electricity, thereby improving yields.

Electrostatic decay time: 1000-10V, within 0.2 sec.

Highly rigid, vibration-free body

The use of structural analysis during the design process has improved rigidity and antivibration parameters to yield clear images even at high magnification.

Nomarski DIC

Standard or high contrast DIC sliders can be selected to suit the sample. This method is useful for the surface observations of various devices and precision molds.

Double-beam interferometry equipment (measures minute height gaps)

Michelson (TI) and Mirau (DI) types of episcopic double- beam interferometry can be carried out. A filar micrometer eyepiece can be used to examine or measure samples while avoiding direct contact.

Epi-fluorescence

UV, V, BV, B or G excitation fluorescence filter blocks can be selected. This method is perfect for the observation of OEL, ion migration and other substrate uses.

Diascopic illumination

Diascopic illumination is used to observe optical parts, FPD and other samples that transmit light.

Condenser

Episcopic Two-beam Interferometry Equipment TI/DI

CFI-series eyepiece

LV-UEPI

An illuminator that can be used for brightfield, darkfield, simple polarizing and DIC observations.

LV-NU5A Nosepiece

A universal motorized nosepiece that is 10 times more durable than its predecessors.

LV-S6 6x6 Stage

An episcopic illumination stage capable of inspecting 150mm wafers. (With 6??? wafer holder)

(Episcopic illumination type)

LV150/LV150A

The LV150 and LV150A microscopes are used for episcopic illumination.

CFI LU Plan Fluor series

These objective lenses feature a high NA, long working distances and an extended transmission wavelength range.

L150A controls

Motorized nosepiece controls

Applications

Semiconductor (IC wafer) Semiconductor (IC wafer) MEMS (optical switch)

(Episcopic/diascopic illumination type)

Applications

LV-TI3 Trinocular Tube

A trinocular tube with an optical path changeover of 100:0/0:100.

CFI-series eyepiece

LV-UEPI2

The LV-UEPI2 illuminator enables brightfield, darkfield, DIC, simple polarizing, and UV excitation epi-fluorescence observations.

Nosepiece

Selectable from C-N6 (brightfield), L-NBD5 (bright/darkfield) and L- NU5 (universal) nosepieces.

LV-S32 3x2 Stage

This small, industrial-use stage has a triple-plate design and can be used for episcopic and diascopic illumination.

LV-LH50PC 12V-50W Lamphouse

A low power-consumption 12V-50W halogen light source equivalent to or higher than the 12V-100W type.

LV100D

The LV100D microscope is capable of episcopic and diascopic illumination.

CFI LU Plan Fluor Series

These objective lenses feature high NA, long working distances and an extended transmission wavelength range.

Eyepiece tubes

Eyepieces

Nosepieces

Illuminators

LV-UEPI

LV-UEPI2

OUT 100

Double Port

Y-IDP Double Port (Beamsplit 45:55/0:100) Y-IDP Double Port 0/100 (Beamsplit 100:0/0:100)

Polarizing/DIC accessories

Objective lenses

CFI LU PLAN FLUOR BD series

Objective adapters

Diascopic illumination condensers

Substages (LV150/LV150A)

Stages

LV-S6 6x6 StageLV-S64 6x4 StageLV-S32 3x2 Stage

Holders

For LV-S6 6x6 StageFor LV-S32 3x2 Stage

Micrometers

ACCESSORIES 15

Digital cameras for microscopes

Ultrahigh-definition Digital Camera

Real imaging camera???DS-2Mv-L1

???Live image display at 30fps max.

???Image size: 1600 x 1200 pixels

???6.3??? TFT monitor

???Analog RGB output

???CompactFlash card slot

???USB mass-storage-class compatible

???Direct print function (Pict bridge compatible) optional*1

???Ethernet (100BASE/TX) port*2

*1: A CP900DC dedicated printer and C-mount adapter are necessary. Provided with real 10 mode (10X printing).

*2: FTP Client/Server, HTTP Server Telnet Server functions provided.

Camera control software for DS-L1/DS-U1

Real imaging camera???DS-2Mv-U1

???Live image display at 12fps (800 x 560)

???Image size: 1600 x 1200 pixels

???PC connection via USB2.0

???Dedicated application software???ACT-2U

Dedicated camera control software ACT-2U

???Approx. 12 million output pixels comparable to film high-end cameras, thanks to Nikon???s exclusive micro- step high-density imaging technology

???Live image display at a frame rate of 12 fps max.

???The wide exposure latitude produces true-to-life images regardless of brightness level.

Camera control software

ACT-1

Minimizes fatigue during large-volume, extended time shooting.

All essential sections, including live image preview, captured image window, thumbnail, and image capture parameter setting panel, are simultaneously displayed on a single screen, enabling users to easily

Option: camera control software

ACT-2

The optional ACT-2U software offers the following arrays of convenient measurement tools.

Scene mode???optimal imaging with a single mouse click

Optimal imaging parameters have been preset for each sample type, therefore anyone, regardless of experience, can easily perform photography of the highest level.

Wafer/IC chipMetal/ceramicsPCB

A host of measuring tools

*Dedicated ACT-2U camera control software is necessary when using the DS-U1.

understand image capture procedures. The size of the parameter setting panel has been reduced to leave more space for image display.

Digital Camera17